Microsystems technology

Objective

Microsystems technology is one of today's key technologies. In addition to microelectronic components, both micromechanical and microoptical structures are integrated into a microsystem. In principle, a distinction is made between monolithic and hybrid system designs. The course focuses on technologies of microstructuring, layer deposition and micro moulding. An introduction to future-oriented nanotechnology is also given.

Focus of the course

• Introduction to microsystems technology Materials of microsystems technology
• Technologies for layer deposition
• Wet chemical etching processes
• Dry chemical etching processes
• Lithographic processes for microstructuring
• The LIGA technique
• Structure and joining techniques in microsystems technology
• Examples of complex microsystems and introduction to nanotechnology